Details

---

UNOZAWA TS Series Large-Capacity Dry Vacuum Pump

The UNOZAWA TS Series is a high-pumping-speed, multi-stage Roots-type dry vacuum pump developed for clean vacuum processes. Its oil-free gas-contact design prevents oil back-diffusion and particle generation, while the high-durability construction supports long continuous operation with extended maintenance intervals. The series is suitable for demanding applications such as sputtering, plasma cleaning, load-lock systems, deposition equipment and TMP roughing.

Large Pumping Speed Dry Vacuum Pump for Clean Processes

• Multi-stage Roots-type dry vacuum pump
• Designed for clean vacuum processes
• High pumping speed for larger vacuum systems
• Oil-free and dry operation at the gas-contact area
• No oil reverse diffusion or dust generation inside the pump
• Low power consumption through multi-stage Roots construction
• High durability with back-flow cooling structure
• Long maintenance cycle with no sliding parts in the gas-contact area
• Low vibration and low operating noise
• Discharge silencer supplied as standard
• Water-cooled design helps reduce heat dissipation to the surrounding environment
• Leak-tight canned-motor construction
• Leak rate: ≤1 × 10⁻⁶ Pa·m³/s
• Suitable for continuous operation
• Intended primarily for non-corrosive gas applications

Models & Specification 

Specification	TS100	TS220	TS300	TS600
Pump Type	Multi-Stage Roots Type Dry Vacuum Pump	Multi-Stage Roots Type Dry Vacuum Pump	Multi-Stage Roots Type Dry Vacuum Pump	Multi-Stage Roots Type Dry Vacuum Pump
Max. Pumping Speed, 50Hz / 60Hz (m³/h)	96 / 114	190 / 230	270 / 330	570 / 570
Ultimate Vacuum, 50Hz / 60Hz (Pa)	10 / 6	6 / 3	6 / 3	10 / 10
Max. Back Pressure (kPa)	110	115	115	115
Ambient Temperature (°C)	5–40	5–40	5–40	5–40
Suction Connection	NW50	VG65	VG65	VG80
Discharge Connection	NW40	NW40	NW50	NW50
Lubricating Oil Capacity (L)	1	2	2	2
Cooling Water Flow (L/min)	>4	>4	>6	>8
Max. Inlet Temperature (°C)	30	30	30	30
Cooling Water Connection (Rc)	3/8	3/8	1/2	1/2
Motor Rating (kW)	3.7	5.5	7.5	13
Electrical Supply, 50Hz	200–240V / 380–415V	200–240V / 380–415V	200–240V / 380–415V	200–240V / 380–415V
Electrical Supply, 60Hz	200–240V / 440–480V	200–240V / 440–480V	200–240V / 440–480V	200–240V / 440–480V

Typical Applications

• Vacuum deposition equipment
• Sputtering equipment
• Load-lock exhaust systems
• Plasma cleaning equipment
• Silicon single-crystal pulling equipment
• Electron-beam processing equipment
• Gas circulation and recovery systems
• Gas displacement systems
• Vacuum forming machines
• Vacuum suction/conveyance
• Vacuum packaging machines
• Vacuum de-airing and defoaming
• Vacuum cooling
• Laboratory and analytical equipment
• Cryopump roughing and regeneration
• Rough pumping for turbo molecular pumps (TMP)
• Other clean vacuum applications

 

Looking for a UNOZAWA Dry Vacuum Pump?

Aceplus Technology supplies genuine UNOZAWA TS Series Dry Vacuum Pumps, together with engineering consultation, product selection, technical support, installation assistance, and after-sales service. Contact our team for product recommendations, pricing, and availability.